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DS Series Equal Pitch Screw Vacuum Pump

DS Series Equal Pitch Screw Vacuum Pump

DS Series Equal Pitch Screw Vacuum Pump Features:

Exhaust Path Is Short, Reduce The Deposition Of Reactants.

  • Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.

The Optimal Linear Sealing, The Pump Performance

  • Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.

Simple Structure, Low Fault Rate And Easy Maintenance

  • Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.

Microcomputer Operation, Remote Monitoring, Considerate Protection

  • Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.

DS Series Equal Pitch Screw Vacuum Pump Advantages:

  • Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.
  • Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.
  • Catch the power connector, safe and convenient.
  • The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.
  • The control signals and communication signal interface, remote monitoring was carried out on the vacuum

DS Series Equal Pitch Screw Vacuum Pump Performance Curve:

DS Performance Curve

DS Series Equal Pitch Screw Vacuum Pump Application:

  • The health care industry.
  • Lighting industry.
  • A variety of analytical instruments.
  • Electronics, semiconductor industry.
  • The power industry.
  • Refrigeration industry.
Type Unit DS180 DS250 DS360 DS540 DS720
50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Pumping Speed m3/hr 180 216 250 300 360 432 540 650 720 850
L/min 3000 3600 4200 5000 6000 7200 9000 10800 12000 14400
L/S 50 60 70 84 100 120 150 180 200 240
Extreme Pressure mbar 0.02 0.01 0.02 0.01 0.02 0.01 0.02 0.01 0.02 0.01
Torr 0.015 0.0075 0.015 0.0075 0.015 0.0075 0.015 0.0075 0.015 0.0075
Pa 2 1 2 1 2 1 2 1 2 1
Power kW 5.5 7.5 7.5 7.5 11 15 15 15 22 22
Speed RPM 2900 3550 2900 3550 2900 3550 2900 3550 2900 3550
Inlet Diameter mm 50 65 70 90 100
Outlet Diameter mm 40 40 55 65 65
Gear chamber oil content L 0.85 0.85 1.4 2 2
Cooling Water L/min 2.5 2.6 2.8 3 4
gal/min 0.67 0.7 0.75 0.8 1.07
Weight Kg 295 350 480 520 680
Noise level dB(A) 75 78   85 96
Operation Temp 5-40
Maximum permissible humidity 90%

Note:
1.The amount of oil listed above is for reference only and is usually fluoride and mineral oil. The device is equipped with pump oil and grease oil.
2.The amount of cooling water is based on the ambient temperature of 30℃ and the cooling water inlet temperature of 20℃ . The use of circulating water will vary, and the water pressure will be 0.15-0.2Mpa.

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